Scanning Electron Microscopy (SEM or SEM) is an electron microscopy technique allowing the surface observation of samples (topography, grain size, defects, porosity, …).

EDX (Energy Dispersive X-ray) spectrometry, coupled with SEM, makes it possible to determine the chemical composition of the surface examined (mineral/metallic or organic elements). It consists of analyzing the X-rays generated by a sample placed under the electron beam of the scanning electron microscope (SEM). The radiation emitted, during the interaction between the X-rays and the material of the sample, is transcribed in the form of spectra where peaks of variable intensity appear, characteristic of the metallic, mineral or organic elements present. EDX allows semi-quantitative chemical analysis of areas of interest.

The MOSAIC platform is equipped with:

  • a HIROX-3000 SEM coupled to an EDX detector (Bruker):
    Spatial resolution: 15nm
    Energies: 1, 5, 10, 15, 20, 25 kV
  • a LEO 440 SEM, currently in a reliability phase:
    Spatial Resolution: 2nm on Silicon
    Energies: 0.1 to 30 kV
  • a JEOL JSM 5900 LV SEM, under repair

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Some examples of applications in support of laboratory research projects:

  • Characterization of the surface of samples,
  • Characterization of surface defects,
  • Identification and characterization of contaminants and deposits,
  • Development and improvement of clean room manufacturing processes by characterizing the designs resulting from these processes.